Knowledge Base

Advanced Cleaning of Silicon-Based Substrates

13 Feb 2023

There are several reasons why one might use an advanced cleaning process like 1165 remover to clean silicon samples instead of using acetone alone.

Advanced Cleaning of Silicon-Based Substrates

First, 1165 remover is a highly effective solvent for removing a wide range of contaminants from silicon surfaces, including photoresist, flux, grease, oil, and other common contaminants. This makes it a useful tool for ensuring that silicon samples are clean and free of contamination prior to testing or analysis.

Second, 1165 remover is specifically designed for use with silicon and has been shown to be less aggressive than other common solvents, when used on silicon surfaces. This means that it is less likely to damage or degrade the silicon samples during the cleaning process.

Overall, using 1165 remover to clean silicon samples can provide a number of benefits, including improved cleaning effectiveness, reduced risk of damage to the samples, and ease of use.

All samply holders are compatible with the process described below. We recommend using a dedicated holder per process to minimize cross-contamination.

The following advanced cleaning method is suitable for most silicon cleaning applications.

1165 Remover and other brands

There are many types of photoresist/polymer stripping solutions similar to 1165 remover. Here are some equivalent formulations:

Microresist 1165 Remover

Kayakuam Remover PG

CMC Materials NanoStrip

All are compatible with samply sample holders.

Method:

1. Place the silicon samples in a samply sample holder. Load into a container that is suitable for use with 1165 remover and IPA.

2. Pour enough 1165 remover into the container to completely cover the samples. The exact amount will depend on the size and number of samples being cleaned.

3. Allow the samples to soak in the 1165 remover for at least 30 minutes, or longer if necessary to remove any dirt, grease, or other contaminants that may be present on the surfaces.

4. After the samples have soaked in the 1165 remover for the required time, carefully lift the samply sample holder and transfer it to a beaker of IPA to completely cover the samples.

5. Allow the samples to soak in the IPA for at least 10 minutes, or longer if necessary to remove any remaining contaminants or residue.

6. After the samples have soaked in the IPA for the required time, carefully pour off the solvent.

7. Dry the samples using compressed air to minimise the residues before using them for further testing or analysis.

Samply holders are compatible with stirrer bars which add agitation to the process. This will improve the overall cleaning of the samples.

It’s important to note that this process may not be appropriate for materials other than silicon. It’s also important to use appropriate safety precautions when working with solvents. Wearing gloves, eye protection, and working in a well-ventilated area are examples of this.

Samply sample holders are compatible with a large range of chemicals listed in this compatibility chart. The range of samply sample holders is designed to fit into standard lab beakers (25ml, 50ml, 100ml) eg Fischer.

Loading...